Proximity processing using controlled batch volume with an integrated proximity head

ABSTRACT

A plating assembly for use in plating metallic materials onto a surface of a substrate is provided. The plating assembly comprising a delivery unit having a fluid chamber, a metallic source, and a porous insert. The plating assembly also comprising a receiving unit having a fluid chamber and a metallic receiver. The receiving unit also has a porous insert. The porous insert of the delivery unit being substantially aligned with, and spaced apart from, the porous insert of the receiving unit. The metallic receiver being substantially aligned with the porous insert of the delivery unit and a path being defined between the delivery unit and the receiving unit. Wherein a plating meniscus is capable of being defined in the path between the porous inserts of the delivery unit and the receiving unit and a substrate is capable of being moved through the plating meniscus to enable the plating of metallic materials onto the surface of the substrate. Examples for de-plating are also provided.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates generally to the processing ofsemiconductor substrates, and more particularly, the plating ofsemiconductor substrates.

2. Description of the Related Art

Semiconductor substrate processing may include multiple operations whereeach operation can be dependent on the previous operation or operations.During processing, a substrate may be subjected to operations such asetching, chemical mechanical polishing, cleaning, and plating. With eachoperation, it is the possible to create defects or to introducecontaminants that can render the final product inoperable. To maximizeoutput, many precautions may be taken in order to minimize processvariables. For example, processing semiconductors in clean roomenvironments is a standard practice intended to minimize processingvariables including reducing sources of potential contamination.However, even with the use of clean room environments it may still bedesirable to minimize exposure and handling of the semiconductorsubstrate.

In conjunction with the desire to minimize exposure and handling of thesemiconductor substrate is the desire to minimize the use of processingchemicals while processing the semiconductor substrate. Reducing theamount of chemicals used during processing may reduce operating costs.Furthermore, due to the potentially hazardous nature of some of thechemical used, reducing the amount of chemicals used can also result ina safer and healthier environment.

In view of the forgoing, there is a need for improved processingtechniques that can minimize both substrate handling and consumption ofprocess chemicals.

SUMMARY

In one embodiment, a substrate plating assembly is disclosed. Thesubstrate plating assembly is comprised of a delivery unit having anexterior surface and an interior chamber capable of housing a consumableplating metal. The interior chamber of the delivery unit is capable ofcontaining a plating fluid and has an opening interfaced by a firstporous insert. The opening of the interior chamber allows the platingfluid to move in and out of the interior chamber of the delivery unit.The substrate plating assembly also has a receiving unit having anexterior surface and an interior volume. The receiving unit is capableof housing a metal that facilitates distribution of an electrical field.The interior volume of the receiving unit is configured to hold at leastpart of the plating fluid. The interior volume of the receiving unitalso has an opening interfaced by a second porous insert that allows theplating fluid to move in and out of the interior chamber of thereceiving unit. The second porous insert is substantially aligned withthe first porous insert, thereby defining a plating meniscus from theplating fluid between the first and second porous inserts. A substratepath is defined by a distance separating the delivery unit and thereceiving unit while the meniscus is formed between the first porousinsert and the second porous insert in the substrate path. Wherein thesubstrate path is configured to provide passage for a substrate. Asurface of the substrate capable of being metallically plated whenexposed to the plating fluid of the plating meniscus as the substrate ismoves through the substrate path between the delivery unit and thereceiving unit.

In another embodiment a plating assembly for use in plating metallicmaterials onto a surface of a substrate is disclosed. The platingassembly comprising a delivery unit having a fluid chamber, a metallicsource, and a porous insert. The plating assembly also comprising areceiving unit having a fluid chamber and a metallic receiver. Thereceiving unit also has a porous insert. The porous insert of thedelivery unit being substantially aligned with, and spaced apart from,the porous insert of the receiving unit. The metallic receiver beingsubstantially aligned with the porous insert of the delivery unit and apath being defined between the delivery unit and the receiving unit.Wherein a plating meniscus is capable of being defined in the pathbetween the porous inserts of the delivery unit and the receiving unitand a substrate is capable of being moved through the plating meniscusto enable the plating of metallic materials onto the surface of thesubstrate.

In yet another embodiment, a method for plating a substrate isdisclosed. The method comprising forming a meniscus from a electrolyticfluid, the meniscus being formed between a plating source and a platingfacilitator. The method also includes moving a substrate through a paththat intersects the meniscus and the substrate being charged so thatplating material in the plating fluid are attracted to a surface of thesubstrate when the meniscus is present on the surface of the substrate.Further included in the method is moving the substrate through themeniscus enabling plating across the surface of the substrate.Additionally, the method includes inducing a charge through themeniscus, such that a charge from the plating source is substantiallyuniformly directed toward the plating facilitator.

In another embodiment, a method for de-plating a substrate is disclosed.The method comprising forming a meniscus from an electrolytic fluid, themeniscus being formed between a first metallic material and a secondmetallic material. The method further includes placing the substrate ata location that intersects the meniscus and the substrate being chargedso that metallic material from a surface of the substrate is attractedaway from the surface of the substrate toward one of either the firstmetallic material or the second metallic material.

Other aspects and advantages of the invention will become apparent fromthe following detailed description, taken in conjunction with theaccompanying drawings, illustrating by way of example the principles ofthe invention.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention, together with further advantages thereof, may best beunderstood by reference to the following description taken inconjunction with the accompanying drawings.

FIG. 1 is a high level schematic of substrate processing apparatus inaccordance with one embodiment of the present invention.

FIG. 2 is a high level schematic of a process module in accordance withone embodiment of the present invention.

FIG. 3A is a cross-section of a plating assembly in accordance with oneembodiment of the present invention.

FIG. 3B is a schematic showing the different areas of the substrate pathin accordance with one embodiment of the present invention.

FIGS. 4A and 4B are schematics illustrating the how the bottom cathodepromotes an even plating of the substrate in accordance with oneembodiment of the present invention.

FIGS. 5A-5D illustrate how to control the batch volume of plating fluid128 within the plating meniscus 142 in accordance with one embodiment ofthe present invention.

FIG. 6A shows a schematic of a perspective view of the plating assemblyin accordance with one embodiment of the present invention.

FIG. 6B shows a schematic of an exploded view of the top section inaccordance with one embodiment of the present invention.

FIG. 7 shows a schematic of the gripper 121 in accordance with oneembodiment of the present invention.

FIG. 8 shows a schematic of the gripper, the plating assembly, and thesubstrate in accordance with one embodiment of the present invention.

FIG. 9 shows a schematic of a process module that includes the platingmodule in accordance with one embodiment of the present invention.

DETAILED DESCRIPTION

An invention is disclosed for devices and methods for performing aplating operation on a surface of a substrate. In the followingdescription, numerous specific details are set forth in order to providea thorough understanding of the present invention. It will be apparent,however, to one skilled in the art that the present invention may bepracticed without some or all of these specific details. In otherinstances, well known process steps have not been described in detail inorder not to unnecessarily obscure the present invention. The variousembodiments will thus be described in accordance with the order of thedrawings, but without limitation to any particular structure orconfiguration, as they are provided to illustrate the many permutations,combinations and/or alternatives, within the spirit and broad scope ofthe enumerated claims.

FIG. 1 is a high level schematic of substrate processing apparatus 100in accordance with one embodiment of the present invention. Thesubstrate processing apparatus 100 can contain a single or multipleprocess modules 102. The process modules 102 can perform a variety ofprocessing including, but not limited to, etching, cleaning, plating,and other substrate preparation operations. The process modules 102 areconnected to a control system 104. The control system 104 can bephysically separated from the process module 102 as shown, or anintegrated component within the process module 102. The control system104 can be used to ensure the required processing conditions andoperations are achieved within the processing module 102. The controlsystem 104 can also monitor and control movement of substrate materialbetween process modules 102. The control system 104 is connected to acomputer 106. The computer 106 can be used to adjust and monitor theperformance of the processing apparatus 100 through the control system104. In one embodiment, the control system 104 can be connected to anetwork, such as the Internet, to enable remote setup, operation, andcontrol.

FIG. 2 is a high level schematic of a process module 102 in accordancewith one embodiment of the present invention. In this embodiment, theprocess module 102 is connected to computer 106 and the control system104 of FIG. 1. The process module 102 may be located in a clean room108. The clean room 108 can include facilities 109 that can providefluids and gases used by the process module 102. The process module 102includes gas controls 110 and fluid controls 112. The gas controls 110can include air filters, gas valves, and devices to control thetemperature and humidity of gases used in the process module. The fluidcontrols 112 can include fluid handlers 114, flow controllers 116, andvalves 118. In one embodiment the fluid handlers 114 can be used tostore process chemicals and de-ionized water. The flow controllers 116and valves 118 can be used to control the mixing and dispensing offluids.

The process module 102 can have a single process station or multipleprocess stations. It should be clear that a process module could containfewer or more process stations than shown in FIG. 2. The individualprocess station can perform one, or a combination of processesincluding, but not limited to, plating, etching, cleaning or otheroperations typically used in the semiconductor processing environment.For simplicity, process station A and process station C are shown asblocks. In one embodiment Process station B includes a plating assembly120, grippers 121 and substrate handlers 123. When a gripper 121 is notmanipulating a substrate 150, the substrate handlers 123 can control themovement of the substrate 150 within the process station. The gripper121 is used to move the substrate 150 from a substrate handler 123through the plating assembly 120. In one embodiment there is a gripper121 on each side of the plating assembly and the substrate 150 ishandled by both of the grippers 121 as the substrate 150 emerges fromthe plating assembly 120. In one embodiment, the grippers 121 alsoprovide an electrical connection to facilitate plating, as will bedescribed below. After passing through the plating assembly thesubstrate 150 is placed on a substrate handler 123.

FIG. 3A is a cross-section of a plating assembly 120 in accordance withone embodiment of the present invention. The plating assembly 120includes a delivery unit 200A and a receiving unit 200B. A distanceseparating the delivery unit 200A from the receiving unit 200 defines asubstrate path 190 through which the substrate 150 can pass. In oneembodiment, the substrate path 190 is defined by a separation gap thatwill enable passage of a substrate, and the separation gap may varydepending on the thickness of the substrate. In an embodiment where thesubstrate is a semiconductor wafer, the separation gap will range frombetween about 5 mm and about 0.5 mm, and more particularly between about4 mm and about 1.5 mm, and in a specific embodiment about 3 mm.

In one embodiment, the delivery unit 200A includes a top section 120 a,a mid-section 120 b and the receiving unit 200B includes a bottomsection 120 c. The top section 120 a may include an anode chamber 122 aand an anode chamber 122 b attached to a plating fluid chamber 122 c.The anode chambers 122 a and 122 b contain anodes 124 a and 124 b,respectively. The anode, or first charge source, may be composed of ametal that is consumed during an electroplating reaction. In oneembodiment the anode, or plating source, is made from a coppercontaining material, substantially pure copper, or copper alloy. Inother embodiments the anodes 124 a and 124 b are made from differentelectroplating materials. The plating fluid chamber 122 c along withanode chamber 122 a and anode chamber 122 b may be filled with a platingfluid 128. In one embodiment the plating fluid 128 is an electrolyticsolution selected because of the ability to promote electroplating.

The anodes 124 a and 124 b may need to be replaced after being consumedduring the electroplating process. The electroplating process (and theconsumption of the anodes) may extend to the plating of one substrate tomany substrates, depending on the thickness being plated and otherfactors. Membranes 126 a and 126 b are placed between the plating fluidchamber 122 c and the respective anode chambers 122 a and 122 b. In thisembodiment, the membranes 126 a and 126 b retain most of the platingfluid 128 within the plating fluid chamber 122 c but allow the passageof copper ions from the anode chambers 122 a and 122 b to the platingfluid chamber 122 c. In one embodiment, mechanically, the membranes 126a and 126 b enable the removal of the respective anode chambers 122 aand 122 b, without requiring draining of the plating fluid 128. Becausethe anodes 124 a and 124 b can be replaced without draining the platingfluid 128, downtime for the plating assembly 120 is minimized. It shouldbe noted that the use of two anodes in the orientation shown in FIG. 3Ais merely one embodiment of the top section 120. Other embodiments ofthe top section 120 a may have more or fewer anodes in differentorientations.

The top section 120 a is attached to the mid-section 120 b. In oneembodiment, the mid-section 120 b includes a pre-wet top head 130 a, apre-wet porous insert 132 a, curtain gas inlet 134 a, a curtain gasinlet 134 b, a rinse/dry top head 136 a and a porous plating insert 140a. The pre-wet top head 130 a may contain a pre-wet fluid and an openingto the substrate path 190 that is interfaced by the pre-wet porousinsert 132 a. The pre-wet porous insert 132 a is saturated with thepre-wet fluid. The curtain gas inlets 134 a and 134 b direct a flow ofpressurized gas toward the bottom section 120 c. The curtain gas may beselected from a multitude of inert gases include mixtures of gases. Inone embodiment the curtain gas can be composed of pure nitrogen. Inother embodiment the curtain gas can be argon or a mixture of nitrogenand argon, IPA, or CO₂. A rinse/dry top head 136 a includes multipleareas capable of providing vacuum suction and rinsing fluid.

As a component of the delivery unit 200A, the mid-section 120 b isconfigured to accommodate the plating fluid chamber 122 c and allow theplating fluid 128 to saturate the porous plating insert 140 a, but stillallow the plating ions to pass through. In one embodiment the platingfluid chamber 122 c extends into the mid-section 120 b from the topsection 120 a. In another embodiment the plating fluid chamber 122 c isformed when a cavity of the top section 120 a is joined with a cavity inthe mid-section 120 b. In yet another embodiment the plating fluidchamber 122 c is a cavity that extends into the top section 120 a fromthe bottom section 120 b. A surface of the porous plating insert 140 ais exposed to the substrate path 190. In one embodiment, the choice ofmaterial for the porous plating insert 140 a is chosen based on theporosity of the material and the viscosity of the plating fluid 128.Materials that can be used for the porous plating insert 140 a caninclude, but are not limited to, porous plastics such as many varietiesof nylon and a variety of porous ceramics.

In one embodiment the receiving unit 200B is located below the deliveryunit 200A. In the embodiment shown in FIG. 3A the receiving unit 200B isthe bottom section 120 c. In another embodiment the receiving unit 200Bmay me made up of multiple assemblies including a bottom section. Thereceiving unit can be connected to the plating assembly 120 b. Thebottom section 120 c may include a pre-wet bottom head 130 b, a pre-wetporous insert 132 b, a rinse/dry bottom head 136 b, a porous platinginsert 140 b, and a bottom cathode 144 within a chamber containingplating fluid 128. The pre-wet bottom head 130 b can contain the samepre-wet fluid used in the pre-wet top head 130 a. An opening from thepre-wet bottom head 130 b to the substrate path 190 is interfaced by thepre-wet porous insert 132 b. The locations of the porous insert 132 aand porous insert 132 b allow a pre-wet meniscus 137 of pre-wet fluid toform in the substrate path 190.

The porous plating insert 140 b interfaces an opening to a chamberwithin the bottom section 120 c that contains the bottom cathode 144, orsecond charge source. To facilitate electroplating, plating fluid 128surrounds the bottom cathode 144, or plating facilitator, and saturatesthe porous plating insert 140 b. Similar to the pre-wet meniscus, theorientation and alignment of the porous plating inserts 140 a and 140 ballow the formation of a plating meniscus 142 across the substrate path190. The rinse/dry bottom head 136 b is similar to the rise/dry top head136 a. The rinse/dry bottom head 136 b includes multiple areas capableof providing vacuum suction and rinsing fluid.

In one embodiment the plating assembly 120 performs a plating operationwhen a substrate 150 passes through the various menisci and dry/rinseareas intersecting the substrate path 190. During the plating operationthe substrate 150 may be held with a first gripper 121 and passed/pushedinto the substrate path 190. In one embodiment, an electrical chargewith the same polarity as the bottom cathode 144 is applied to thesubstrate 150 using a cathode 146. In one embodiment the cathode 146 maybe incorporated into the first gripper 121. As the substrate 150 entersthe substrate path 190 the leading edge of the substrate 150 passesthrough the curtain gas from curtain gas inlet 134 a followed by thepre-wet meniscus 137. As the substrate 150 enters the pre-wet meniscus137 the curtain gas may help prevent pre-wet fluid from running acrossthe surface of the substrate 150 to the exterior of the plating assembly120. As previously mentioned, the curtain gas can be an inert gas suchas nitrogen, IPA, CO₂, argon or a mixture thereof. Because the pre-wetfluid can be used to prepare the substrate 150 for plating, the choiceof a pre-wet fluid can vary depending on the particular plating fluid128 and the type of metal being plated. For example, if a copper sulfateplating solution is being used the pre-wash fluid can include a philicagent to promote copper plating on the substrate 150.

As the substrate 150 enters the plating meniscus 142 the electricalcharge applied to the substrate in conjunction with the electricalcharge from the bottom cathode 144 attract metal ions in the platingsolution 128 to the surface of the substrate 150. After passing throughthe plating meniscus 142, the substrate 150 passes under the curtain gasinlet 134 b. Curtain gas inlet 134 b helps to contain the plating fluid128 and prevent the plating fluid 128 from escaping to the exterior ofthe plating assembly 120. Note that in this embodiment it is possiblefor fluid from the pre-wet meniscus 137 to mix with the plating fluid128. However, curtain gas from both curtain gas inlets 134 a and 134 bare meant to contain both the pre-wet fluid and the plating fluid 128within the plating assembly 120. In another embodiment, additionalcurtain gas inlets between the pre-wet meniscus 137 and the platingmeniscus 142 could prevent the mixing of pre-wet fluid and plating fluid128.

After passing through the curtain gas inlet 134 b the substrate 150encounters a vacuum area surrounding the rinse/dry top head 136 a andthe rinse/dry bottom head 136 b. In one embodiment the rinse/dry tophead 136 a and the rinse/dry bottom head 136 b can define a cleaningarea positioned at an exit of the plating assembly. The first vacuumarea encountered by the substrate 150 can remove residual plating fluidmoisture from the surface of the substrate. After the first vacuum areathe substrate 150 passes through the fluid meniscus 138 between therinse/dry top head 136 a and the rinse/dry bottom head 136 b. The fluidmeniscus 138 is where the now plated surface of the substrate 150 isexposed to rinsing fluids. The rinsing fluids can include de-ionizedwater, chemicals or a mixture thereof. Other fluids may be used to rinsethe substrate and those listed should not be considered inclusive ofpotential rinsing fluids. After passing through the fluid meniscus 138,the substrate 150 passes through a second vacuum area. The second vacuumarea can remove any residual fluid and ensure the substrate 150 is in asubstantially dry state. Thus, the substrate 150 can enter the platingassembly 120 dry and exit dry. This is a substantial benefit over otherplating systems that require additional assemblies to rinse and dry asubstrate after a plating operation.

A second gripper may be waiting to clamp onto the portion of thesubstrate 150 that exits the plating assembly 120. Because the firstgripper would prevent the entire substrate from being plated, the secondgripper can pull the substrate 150 through the plating assembly 120.Similar to the first gripper, the second gripper may also be able toapply an electrical charge to the substrate 150 using a cathode 146. Ata certain point the first and second grippers may be movingsimultaneously, each clamped to the substrate 150. The first gripper mayrelease the substrate 150 while the second gripper continues to move thesubstrate 150 through the plating assembly 120 while continuing to applyan electrical charge to the substrate.

FIG. 3B is a schematic showing the different areas of the substrate path190 in accordance with one embodiment of the present invention. Thecurtain gas inlet 134 a are shown as a row of circles that are followedby the pre-wet meniscus 137. The plating meniscus 142 can be seen alongwith the curtain gas inlets 134 b. In another embodiment the curtain gasinlet 134 a/b could be a slot that allows the curtain gas to escape intothe path 140. The fluid meniscus 138 is visible after the curtain gasinlet 134 b. Not shown are the first and second vacuum areas. In oneembodiment the vacuum could be drawn through small holes. In anotherembodiment, the vacuum could be drawn through a slot. Note that thecurtain gas inlets 134 a/b, pre-wet meniscus 137, plating meniscus 142,and fluid meniscus 138 can be positioned so they extended beyond theedges of the substrate 150. This helps to ensure that the entire surfaceof the substrate 150 is processed.

FIGS. 4A and 4B are schematics illustrating the how the bottom cathode144 promotes an even plating of the substrate 150 in accordance with oneembodiment of the present invention. Grippers 122 hold the substrate150, and as previously discussed, the grippers 122 can apply anelectrical charge to the substrate 150 using the cathodes 146. Thesubstrate 150 is guided into the plating meniscus 142 made from platingfluid 128. The anodes 124 a/b are consumed during the electrolysisprocess by release metallic ions (e.g., copper ions Cu+) into theplating fluid 128. The metallic ions are drawn toward the oppositelycharged cathode 144 and the substrate 150.

Though the substrate 150 is electrically charged as a cathode, the useof the cathode 144 can help assist in the uniform application of aplating layer 152 on the substrate 150. Using only the substrate 150 asthe cathode, or second charge source, it is possible for an unevendeposition of plating material at the edge of the substrate. This unevenplating may be caused of the concentration of the electric field at theedge of the substrate as the substrate moves in or out of the system. Asshown in FIG. 4B, the cathode 144 extends beyond the edges of thesubstrate 150. Thus, the cathode 144 can prevent excessive build up ofplating material at the edge of the substrate 150 by providing an evenelectrical field across the substrate 150, including the edge. Thus, theelectric field will be substantially even when the substrate is present,when the substrate is not present, and when the substrate is intransition through the path 190 (e.g., at any stage of progressionthrough the path 190 of the plating assembly 120). This is a particularbenefit, as reliance on the substrate 150 as the only cathode canproduce the above-mentioned non-uniformities in plating.

FIGS. 5A-5D illustrate how to control the batch volume of plating fluid128 within the plating meniscus 142 in accordance with one embodiment ofthe present invention. For clarity, FIGS. 5A-5D only show the platingmeniscus. Note that the techniques used to control the plating meniscus142 could also be applied to other menisci used in other processesincluding those in the plating assembly 120. FIG. 5A shows the substrateis seen approaching the plating assembly 120. Before the substrate 150enters the plating meniscus 142, the plating meniscus is stable. In thiscase, a stable meniscus means that the plating fluid 128 is containedbetween the porous plating inserts 140 a/b. In one embodiment the volumeof the plating meniscus is about 70 mL and the volume of the pre-wetmeniscus is about 8 mL. Note that the volume of the plating meniscus andthe pre-wet meniscus can be dependent on the size of the substrate beingprocessed. The volume of the menisci can also vary based on the materialbeing plated to the substrate and the speed of the substrate through theprocessing assembly.

As the substrate 150 moves into the plating meniscus 142, as shown inFIG. 5B, plating fluid 128 is removed from the plating meniscus 142using fluid control out valves 160 a and 160 b. The removal rate theplating fluid 128 corresponds with the displacement of plating fluid 128from the plating meniscus 142 by the intrusion of the substrate 150. Byremoving plating fluid 128 from the plating meniscus 142 at the samerate the substrate 150 displaces the plating fluid 128, the platingmeniscus 142 remains stable. One of the many benefits of maintaining aplating meniscus 142 is the minimization of the plating fluid 128 thatis wasted. Another benefit of maintaining a stable plating meniscus 142is that it is possible to calculate precise volumes of fluids requiredfor a plating process. Another benefit is that the plating meniscus 142remains contained to the location of process, without dripping orspillage.

In the embodiment shown in FIGS. 5A-5D the substrate 150 is shown ascircular. Therefore, after half of the substrate 150 has been platedplating fluid 128 needs to be added to maintain a stable meniscus. Asshown in FIG. 5C, the fluid control valves 160 a and 160 b can allow thereintroduction of plating fluid 128 at the same rate the displacedvolume of plating fluid is decreasing to maintain the stability of theplating meniscus 142. It should be noted that the fluid control valves160 a/b may be used to add and remove fluid from the plating meniscusbased on a substrate of any shape and rate of movement. FIG. 5Dillustrates the substrate 150 as it exits the plating meniscus 142. Thefluid control valves 160 a/b continue to add plating fluid 128 in orderto compensate for the decreasing displacement of fluid from thesubstrate 150 and maintain a stable plating meniscus.

FIG. 6A shows a schematic of a perspective view of the plating assembly120 in accordance with one embodiment of the present invention. Visiblein FIG. 6A is the top section 120 a, mid-section 120 b and bottomsection 120 c. In the embodiment shown in FIG. 6A the anode chamber 122a and 122 b are shown connected to the plating fluid chamber 122 c. Thesubstrate 150 can be seen partially inserted into the substrate path190. Also shown on the embodiment of mid-section 120 b are multipleports to the interior chambers of the plating assembly 120. Note thatthe ports shown in FIG. 6A are exemplary and should not inclusive of thepossible ports on the plating assembly 120. The ports can be used tosupply the curtain gas or processing fluids such as de-ionized water,isopropyl alcohol, carbon dioxide, inert gases, or plating fluid. Theports can also be used to draw a vacuum for the rinse/dry head. Theplating assembly 120, although shown in isolation, is in one embodiment,connected to a module. The module can either be a self-contained moduleor can be a multiple station module. A plating module, in a broad sense,is a unit that will hold the plating assembly 120, and can acceptsubstrates to be plated in a dry state and output substrates in a drystate. The plating module can therefore be integrated with othermodules, such as etching modules, chemical mechanical polishing modules,etc. Within the plating module, the ambient environment can also becontrolled, so that a desired level of controlled plating can beachieved. In one embodiment, the controlled ambient can be a reducedoxygen ambient, that will assist in reducing oxidation after the platingoperation is complete. Of course, other uses implementations of theplating module can also take place.

FIG. 6B shows a schematic of an exploded view of the top section 120 ain accordance with one embodiment of the present invention. The platingfluid chamber 122 c is shown along with frames 154 a/b and membranes 126a/b. The frames 154 a/b can be used to hold the membranes 126 a/b. Inone embodiment the plating fluid chamber 122 c includes recessed areasto accommodate the frames 154 a/b and the membranes 126 a/b. The frames154 a/b and corresponding membranes 126 a/b may be attached to theplating fluid chamber 122 c using a variety of fastening techniquesincluding mechanical fasteners, adhesives, etc.

As previously discussed, the membranes 126 a/b retain most of theplating fluid within the plating fluid chamber while allowing thepassage of electroplating ions from the anodes 124 a/b. As shown in FIG.6B, the anodes 124 a/b and the anode chambers 122 a/b can be attached tothe plating fluid chamber 122 c using mechanical fasteners such asscrews. In other embodiments different fastening techniques may be usedsuch as adhesives. The anodes 124 a/b may include features thatfacilitate attaching the anodes 124 a/b to the anode chamber 122 a/b.

Because substrate processing can be highly sensitive to contaminationthe choice of material for the plating fluid chamber 122 c and anodechambers 122 a/b can include, but are not limited to, plastics and othermaterials that do not create contaminants when exposed to anelectroplating environment. One example of a plastic that can be usedfor the plating fluid chamber 122 c and the anode chamber 122 a/b ispolycarbonate. Because the anodes are consumed during the electroplatingprocess, the use of a clear or substantially clear polycarbonate for theanode chambers 122 a/b enables visual inspection of the anodes todetermine if an anode requires replacement. The frames 154 a/b can alsobe made from a plastic such as polycarbonate. However, because theframes 154 a/b are internal components the toughness and transparentqualities of polycarbonate are not necessary. Thus, the frames 154 a/bcan also be made from plastics such as nylon.

FIG. 7 shows a schematic of the gripper 121 in accordance with oneembodiment of the present invention. In one embodiment the gripper 121can include electrodes 180. The electrodes can move from a firstposition not in contact with the substrate 150 to a second positioncontacting the substrate 150. When contacting the substrate 150 theelectrodes 180 may impart an electrical charge that enables thesubstrate 150 to act as a cathode. Note that in some embodiments anelectrical charge is applied to the substrate 150 when the electrodescontact the substrate. In other embodiments the electrical charge can becontrolled so the electrodes 180 may be in contact with the substrate150 without passing a charge.

FIG. 8 shows a schematic of the gripper 121, the plating assembly 120,and the substrate 150 in accordance with one embodiment of the presentinvention. A substrate 150 is shown partially inserted into the platingassembly 120. For clarity, a gripper is not shown holding the substrate150. The gripper 121 is shown on the output side of the plating assembly120. In this example, the substrate 150 has not emerged from the platingassembly.

FIG. 9 shows a schematic of a process module 102 that includes theplating module 120 in accordance with one embodiment of the presentinvention. The plating assembly is shown connected to the computer 106.Also connected to the computer 106 are grippers 121. Ports on theplating assembly are attached to facilities.

The ability for the plating assembly 120 to accept a dry substrate 150and output a plated, clean and dry is enabled by the integration of therinse/dry head, also known as a proximity head, with the platingassembly 120. One of the many benefits of integrating the proximity headis that the substrate does not need to be moved to a separate clean/drystation either within the process station or within a separate processmodule. Because the substrate does not need to travel to another stationor module handling of the substrate is reduced and that can reduce thepossibility of introducing contaminants to the substrate. Anotherbenefit of integrating the proximity head with the plating assembly maybe the reduction in the physical footprint of the process station andprocess module. Since a separate process station or process module is nolonger required to rinse/dry the substrates the process stations and theprocess modules may be constructed to by physically smaller.Alternatively, the space saved by integrating the proximity head can beused to add different process stations allowing more operations to beperformed within a process module.

In another embodiment, the plating apparatus 120 can be used as ade-plating apparatus. With minor modifications, the plating apparatus120 may be used to remove a metallic material from the surface of asubstrate material. The modifications may include, but not are limitedto, reversing the polarity of the electrodes. Thus, the cathode in theplating operation becomes an anode for a de-plating operation.Similarly, the polarity of the charge applied to the substrate may alsobe reversed, thereby making the substrate an anode. Furthermore, thepolarity of the plating anode may be reversed resulting in the platinganode becoming a de-plating cathode. Additional modification of theplating apparatus may be necessary to enable de-plating includingmodifications to remove gaseous byproducts of the de-plating process.

Further, during de-plating, the substrate can be placed within themeniscus in many ways. For instance, the substrate can first be placedin a de-plating position and then the de-plating meniscus can beactivated and allowed to be placed over the surface of the substrate.The de-plating meniscus can also be formed first, and then the substrateis placed into the meniscus.

In another embodiment, the substrate, once in the de-plating position,can be moved or traversed in a direction, and the direction can eitherbe linear or rotation. The handling of the substrate can therefore takeon many forms and the connections to the substrate can be made such thatthe electric connection is moved or shifted to enable full de-plating ofthe material, even when the substrate is handled by a charged handler.The handler can take on many forms, and such forms may include rollers,grippers, plurality of pins or rollers with metallic connections atcontact regions, such that the substrate can be supported, transported,rotated and otherwise handled.

For additional information with respect to the proximity head notedabove, reference can be made to an exemplary proximity head, asdescribed in the U.S. Pat. No. 6,616,772, issued on Sep. 9, 2003 andentitled “METHODS FOR WAFER PROXIMITY CLEANING AND DRYING.” This U.S.Patent Application, which is assigned to Lam Research Corporation, theassignee of the subject application, is incorporated herein byreference.

For additional information about top and bottom menisci, reference canbe made to the exemplary meniscus, as disclosed in U.S. patentapplication Ser. No. 10/330,843, filed on Dec. 24, 2002 and entitled“MENISCUS, VACUUM, IPA VAPOR, DRYING MANIFOLD.” This U.S. PatentApplication, which is assigned to Lam Research Corporation, the assigneeof the subject application, is incorporated herein by reference.

For additional information with respect to fluids, reference can be madeto the exemplary processes and systems, as disclosed in U.S. patentapplication Ser. No. 11/513,634, filed on Aug. 30, 2006 and entitled“PROCESSES AND SYSTEMS FOR ENGINEEING A COPPER SURFACE FOR SELECTIVEMETAL DEPOSITION”. This U.S. Patent Application, which is assigned toLam Research Corporation, the assignee of the subject application, isincorporated herein by reference.

For additional information about fluids, reference can be made to theexemplary processes and systems, as disclosed in U.S. patent applicationSer. No. 11/514,038, filed on Aug. 30, 2006 and entitled “PROCESSES ANDSYSTEMS FOR ENGINEERING A BARRIER SURFACE FOR COPPER DEPOSITION”. ThisU.S. Patent Application, which is assigned to Lam Research Corporation,the assignee of the subject application, is incorporated herein byreference.

For additional information about fluids, reference can be made to theexemplary processes and systems, as disclosed in U.S. patent applicationSer. No. 11/513,446, filed on Aug. 30, 2006 and entitled “PROCESSES ANDSYSTEMS FOR ENGINEERING A SILICON-TYPE SURFACE FOR SELECTIVE METALDEPOSITION TO FORM A METAL SILICIDE”. This U.S. Patent Application,which is assigned to Lam Research Corporation, the assignee of thesubject application, is incorporated herein by reference.

For additional information regarding plating fluids, plating materialsor plating solutions, reference can be made to the exemplary solutionsas disclosed in U.S. patent application Ser. No. 11/382,906, filed onMay 11, 2006 and entitled “PLATING SOLUTION FOR ELECTROLESS DEPOSITIONOF COPPER”. This U.S. Patent Application, which is assigned to LamResearch Corporation, the assignee of the subject application, isincorporated herein by reference.

Additional information regarding plating fluids and plating solutionscan be found by referencing the exemplary solutions as disclosed in U.S.patent application Ser. No. 11/472,266, filed on Jun. 28, 2006 andentitled “PLATING SOLUTIONS FOR ELECTROLESS DEPOSITION OF COPPER”. ThisU.S. Patent Application, which is assigned to Lam Research Corporation,the assignee of the subject application, is incorporated herein byreference.

Aspects of the control, programming or interfacing may be practiced withother computer system configurations including hand-held devices,microprocessor systems, microprocessor-based or programmable consumerelectronics, minicomputers, mainframe computers and the like. Theinvention may also be practiced in distributing computing environmentswhere tasks are performed by remote processing devices that are linkedthrough a network.

With the above embodiments in mind, it should be understood that theinvention may employ various computer-implemented operations involvingdata stored in computer systems. These operations are those requiringphysical manipulation of physical quantities. Usually, though notnecessarily, these quantities take the form of electrical or magneticsignals capable of being stored, transferred, combined, compared, andotherwise manipulated. Further, the manipulations performed are oftenreferred to in terms, such as producing, identifying, determining, orcomparing.

Any of the operations described herein that form part of the inventionare useful machine operations. The invention also relates to a device oran apparatus for performing these operations. The apparatus may bespecially constructed for the required purposes, such as the carriernetwork discussed above, or it may be a general purpose computerselectively activated or configured by a computer program stored in thecomputer. In particular, various general-purpose machines may be usedwith computer programs written in accordance with the teachings herein,or it may be more convenient to construct a more specialized apparatusto perform the required operations.

The invention can also be embodied as computer readable code on acomputer readable medium. The computer readable medium is any datastorage device that can store data, which can thereafter be read by acomputer system. The computer readable medium can also be distributedover a network coupled computer systems so that the computer readablecode is stored and executed in a distributed fashion.

Although the foregoing invention has been described in some detail forpurposes of clarity of understanding, it will be apparent that certainchanges and modifications may be practiced within the scope of theappended claims. For instance, in another embodiment, a meniscus can beformed to the size or larger than the substrate, and the substrate canbe exposed to the meniscus in a clam shell operating-like process (toeither one or both sides of the substrate). The clam shelloperating-like process can also be used to de-plate the entire surfaceof the substrate, if the substrate is first place in position and then afluid is allowed to contact the substrate surface. In such embodiments,the substrate is provided with electrical contact and the platingassembly is modified for size, handling, and/or support. Accordingly, itshould be understood that many modification, permutations, adjustmentsand configuration are possible, so long as the basic elements of theclaims that are appended hereto are understood in their broadest termsand application.

Accordingly, the present embodiments are to be considered asillustrative and not restrictive, and the invention is not to be limitedto the details given herein, but may be modified within the scope andequivalents of the appended claims.

1. A substrate plating assembly comprising: a delivery unit having anexterior surface and an interior chamber housing a consumable platingmaterial, the interior chamber containing a plating fluid, the interiorchamber having an opening interfaced by a first porous insert thatallows the plating fluid to move in and out of the interior chamber ofthe delivery unit; a receiving unit having an exterior surface and aninterior volume housing a cathode, the cathode facilitating distributionof an electrical field, the interior volume of the receiving unitconfigured to hold at least part of the plating fluid, and the interiorvolume of the receiving unit having an opening interfaced by a secondporous insert that allows the plating fluid to move in and out of theinterior chamber of the receiving unit, such that the second porousinsert is substantially aligned with the first porous insert, therebydefining a plating meniscus from the plating fluid between the first andsecond porous inserts; and a substrate path defined by a distanceseparating the delivery unit and the receiving unit, the meniscus beingformed between the first porous insert and the second porous insert inthe substrate path; wherein the substrate path is configured to providepassage for a substrate, and a surface of the substrate capable of beingplated when exposed to the plating fluid of the plating meniscus as thesubstrate is caused to move through the substrate path between thedelivery unit and the receiving unit.
 2. The substrate plating assemblyas recited in claim 1, further comprising: a first charge source, thefirst charge source is configured to be coupled to the consumableplating material in the delivery unit.
 3. The substrate plating assemblyas recited in claim 2, further comprising: a second charge source, thesecond charge source is configured to be coupled to the cathode in thereceiving unit.
 4. The substrate plating assembly as recited in claim 3,wherein the second charge source is coupled to the substrate.
 5. Thesubstrate plating assembly as recited in claim 1, wherein the interiorchamber of the delivery unit includes a plating fluid chamber and a pairof chambers for containing the consumable plating material.
 6. Thesubstrate plating assembly as recited in claim 5, wherein the platingfluid chamber is separated from each of the pair of chambers by a firstand second membrane.
 7. The substrate plating assembly as recited inclaim 1, wherein the volume of the plating fluid forming the platingmeniscus can be adjusted to maintain a stable meniscus based on thevolume of plating fluid displaced by the wafer as it passes through themeniscus.
 8. The substrate plating assembly as recited in claim 1,wherein the plating fluid is an electrolyte.
 9. The substrate platingassembly as recited in claim 1, wherein the opening to the interiorchamber of the delivery unit is on a bottom surface of the deliveryplating head.
 10. The substrate plating assembly as recited in claim 1,wherein the opening to the interior chamber of the receiving platinghead is on a top surface of the receiving plating head.
 11. Thesubstrate plating assembly as recited in claim 1, further comprising: apre-wet top head defined in the delivery unit, the pre-wet headincluding a chamber capable of holding a pre-wet fluid and is interfacedwith a first pre-wet porous insert having a first face exposed to thesubstrate path and a second face exposed to the chamber of the pre-wettop head; and a pre-wet bottom head defined in the receiving unit, thepre-wet bottom head including a chamber capable of holding the pre-wetfluid and is interfaced with a second pre-wet porous insert having afirst face exposed to the substrate path and a second face exposed tothe chamber of the pre-wet bottom head, such that the second pre-wetporous insert is substantially aligned with the first pre-wet porousinsert, thereby capable of defining a pre-wet meniscus from the pre-wetfluid between the first and second pre-wet porous inserts; wherein thesubstrate path is configured to provide passage for the substrate, andthe surface of the substrate is exposed to the pre-wet fluid of thepre-wet meniscus before the surface of the substrate is exposed to theplating fluid, as the substrate is caused to move through the substratepath between the delivery unit and the receiving unit.
 12. A substrateplating assembly as recited in claim 1, further comprising: a rinse/drytop head defined in the delivery unit including a plurality of portscapable of dispensing a rinsing fluid to the surface of the substrateand a plurality of ports capable of drawing a vacuum from the surface ofthe substrate; and a rinse/dry bottom head defined in the receiving unitincluding a plurality of ports capable of dispensing the rinsing fluidto the surface of the substrate and a plurality of ports capable ofdrawing a vacuum from the surface of the substrate; wherein thesubstrate is exposed to the rinsing fluid and vacuum as the substrateexits the substrate plating assembly.
 13. A plating assembly for use inplating metallic materials onto a surface of a substrate, comprising: adelivery unit having a fluid chamber, an anode, and a porous insert; areceiving unit having a fluid chamber and a cathode, and a porousinsert, the porous insert of the delivery unit being substantiallyaligned with and spaced apart from the porous insert of the receivingunit and the cathode being substantially aligned with the porous insertof the delivery unit; a path being defined between the delivery unit andthe receiving unit; wherein a plating meniscus is defined in the pathbetween the porous inserts of the delivery unit and the receiving unitand a substrate is capable of being moved through the plating meniscusto enable the plating of metallic materials onto the surface of thesubstrate.
 14. The plating assembly as recited in claim 13, furthercomprising: a first charge source, the first charge source is configuredto be coupled to the anode.
 15. The plating assembly as recited in claim14, further comprising: a second charge source, the second charge sourceis configured to be coupled to the cathode.
 16. The plating assembly asrecited in claim 15, wherein the second charge source is coupled to thesubstrate.
 17. The plating assembly as recited in claim 13, furthercomprising: a second fluid chamber and a second porous insert defined inthe delivery unit; a second fluid chamber and a second porous insertdefined in the receiving unit, the second porous insert of the deliveryunit substantially aligned and spaced apart from the second porousinsert of the receiving unit; wherein a pre-wet meniscus is capable ofbeing defined in the path between the second porous insert defined inthe delivery unit and the second porous insert defined in the receivingunit and the substrate is capable of being moved through the pre-wetmeniscus before the substrate is exposed to the plating meniscus. 18.The plating assembly as recited in claim 13, further comprising: aplurality of rinsing fluid ports capable of dispensing a rinsing fluidto the surface of the substrate and a plurality of vacuum ports capableof drawing a vacuum from the surface of the substrate, the plurality ofrinsing fluid ports and the plurality of vacuum ports defined in thedelivery unit; a second plurality of rinsing fluid ports capable ofdispensing a rinsing fluid to the surface of the substrate and a secondplurality of vacuum ports capable of drawing a vacuum from the surfaceof the substrate, the second plurality of rinsing fluid ports and thesecond plurality of vacuum ports defined in the receiving unit; whereina cleaning area is defined in the path between the plurality of rinsingfluid ports defined in the delivery unit and the receiving unit, suchthat the cleaning area is positioned at an exit of the plating assembly.